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Flash Lamp Annealing Rebohle 1st ed. 2019 edition
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Flash Lamp Annealing
Rebohle
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
288 pages, 10 Tables, color; XVIII, 288 p.
| Media | Böcker Bok |
| Releasedatum | 6 augusti 2019 |
| ISBN13 | 9783030232986 |
| Utgivare | Springer Nature Switzerland AG |
| Antal sidor | 288 |
| Mått | 150 × 220 × 20 mm · 577 g |
| Språk | Tyska |
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