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![Cover for Sergey Y Yurish · Smart Sensors and MEMS: Proceedings of the NATO Adavanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal 8 - 19 September 2003 - NATO Science Series II (Inbunden Bok) [2004 edition] (2005)](https://imusic.b-cdn.net/images/item/original/271/9781402029271.jpg?sergey-y-yurish-2005-smart-sensors-and-mems-proceedings-of-the-nato-adavanced-study-institute-on-smart-sensors-and-mems-povoa-de-varzim-portugal-8-19-september-2003-nato-science-series-ii-inbunden-bok&class=scaled&v=1423693654)
![Cover for Sergey Y Yurish · Smart Sensors and MEMS: Proceedings of the NATO Adavanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal 8 - 19 September 2003 - NATO Science Series II (Pocketbok) [2004 edition] (2005)](https://imusic.b-cdn.net/images/item/original/288/9781402029288.jpg?sergey-y-yurish-2005-smart-sensors-and-mems-proceedings-of-the-nato-adavanced-study-institute-on-smart-sensors-and-mems-povoa-de-varzim-portugal-8-19-september-2003-nato-science-series-ii-pocketbok&class=scaled&v=1423693655)