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Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
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Micro / Nanolithography: A Heuristic Aspect on the Enduring Technology
Jagannathan Thirumalai
The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques.
134 pages
Media | Böcker Inbunden Bok (Inbunden bok med hårda pärmar och skyddsomslag) |
Releasedatum | 2 maj 2018 |
ISBN13 | 9781789230307 |
Utgivare | IntechOpen |
Antal sidor | 134 |
Mått | 251 × 176 × 17 mm · 406 g |
Språk | Engelska |
Redaktör | Thirumalai, Jagannathan |
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