Tipsa dina vänner om produkten:
Atomic Layer Deposition for Semiconductors Softcover reprint of the original 1st ed. 2014 edition
Pris
SEK 2.059
Beställningsvara
Förväntad leverans 20 aug - 3 sep
Lägg till din iMusic-önskelista
eller
Atomic Layer Deposition for Semiconductors
This edited volume discusses atomic layer deposition (ALD) for all modern semiconductor devices, moving from the basic chemistry of ALD and modeling of ALD processes to sections on ALD for memories, logic devices, and machines. The section on ALD for logic devices covers both front-end of the line processes and back-end of the line processes.
273 pages, 89 black & white illustrations, 81 colour illustrations, 3 black & white tables, 1 colour
| Media | Böcker Pocketbok (Bok med mjukt omslag och limmad rygg) |
| Releasedatum | 23 augusti 2016 |
| ISBN13 | 9781489979438 |
| Utgivare | Springer-Verlag New York Inc. |
| Antal sidor | 263 |
| Mått | 234 × 155 × 18 mm · 482 g |
| Språk | Engelska |
| Redaktör | Hwang, Cheol Seong |