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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing - Springer Series in Advanced Manufacturing Wei Gao 2010 edition
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Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing - Springer Series in Advanced Manufacturing
Wei Gao
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items.
367 pages, 3 black & white tables, biography
| Media | Böcker Inbunden Bok (Inbunden bok med hårda pärmar och skyddsomslag) |
| Releasedatum | 28 juni 2010 |
| ISBN13 | 9781849962537 |
| Utgivare | Springer London Ltd |
| Antal sidor | 354 |
| Mått | 241 × 165 × 28 mm · 635 g |
| Språk | Engelska |
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