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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition
S a Campbell
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Semiconductor Micromachining: Techniques and Industrial Applications Volume 2 edition
S a Campbell
A two-volume comprehensive guide to both the fundamental physics and chemistry of semiconductor processing, this text covers a broad range of topics ranging from chemical processes through to the microstructuring of semiconductors. Volume two concerns techniques and industrial applications.
406 pages, 141 illustrations, 34 graphs, 18 tables
Media | Böcker Inbunden Bok (Inbunden bok med hårda pärmar och skyddsomslag) |
Releasedatum | 8 maj 1998 |
ISBN13 | 9780471966821 |
Utgivare | John Wiley & Sons Inc |
Antal sidor | 408 |
Mått | 163 × 237 × 29 mm · 775 g |
Språk | Engelska |
Redaktör | Campbell, S. A. |
Redaktör | Lewerenz, H. J. |
Se alt med S a Campbell ( t.ex. Inbunden Bok )