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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
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Fundamental Principles of Optical Lithography: The Science of Microfabrication
Mack, Chris (Lithoguru.com)
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.
534 pages, Illustrations
Media | Böcker Pocketbok (Bok med mjukt omslag och limmad rygg) |
Releasedatum | 16 november 2007 |
ISBN13 | 9780470727300 |
Utgivare | John Wiley & Sons Inc |
Antal sidor | 544 |
Mått | 247 × 174 × 29 mm · 916 g |
Språk | Engelska |
Se alt med Mack, Chris (Lithoguru.com) ( t.ex. Pocketbok och Inbunden Bok )