Fundamental Principles of Optical Lithography: The Science of Microfabrication - Mack, Chris (Lithoguru.com) - Böcker - John Wiley & Sons Inc - 9780470727300 - 16 november 2007
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Fundamental Principles of Optical Lithography: The Science of Microfabrication

Mack, Chris (Lithoguru.com)

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SEK 799

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Fundamental Principles of Optical Lithography: The Science of Microfabrication

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.


534 pages, Illustrations

Media Böcker     Pocketbok   (Bok med mjukt omslag och limmad rygg)
Releasedatum 16 november 2007
ISBN13 9780470727300
Utgivare John Wiley & Sons Inc
Antal sidor 544
Mått 247 × 174 × 29 mm   ·   916 g
Språk Engelska