Tipsa dina vänner om produkten:
Rapid Thermal Processing: Science and Technology Fair
Har du en profil? Logga in
Få avisering om nya utgåvor med Fair
Lägg till din iMusic-önskelista
eller
Rapid Thermal Processing: Science and Technology
Fair
Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing.
430 pages
| Media | Böcker Inbunden Bok (Inbunden bok med hårda pärmar och skyddsomslag) |
| Releasedatum | 15 april 1993 |
| ISBN13 | 9780122476907 |
| Utgivare | Elsevier Science Publishing Co Inc |
| Antal sidor | 430 |
| Mått | 152 × 229 × 25 mm · 725 g |
| Redaktör | Fair, Richard B. |
